Press Release


ULVAC Launches Revolutionary PZT Piezoelectric Thin-film Process Technology and HVM Solution for MEMS Sensors/Actuators
Aug 16, 2019 13:00 JST
ULVAC, Inc. today announced the successful launch of PZT piezoelectric thin-film sputtering technology and a high volume manufacturing (HVM) solution to solve technical issues that have hindered the development of MEMS devices.
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ULVAC Announces the LS High-speed Series of Dry Vacuum Pump
Apr 19, 2018 12:00 JST
ULVAC, Inc., the global leader in vacuum technologies and solutions, has announced the LS series of dry vacuum pumps, with high pumping speed and low power consumption.
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ULVAC Launches Sales of Two Ion Implanters for Power Devices
Jul 06, 2017 17:00 JST
ULVAC, Inc. launches sales of low-acceleration ion implanter, "SOPHI-30" and high-acceleration ion implanter, "SOPHI-400" used for ultrathin wafers processing for power devices.
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ULVAC Launches NA-1500 Dry Etching System for 600mm Advanced Packaging Substrates
Mar 21, 2017 10:00 JST
ULVAC, Inc. is pleased to announce the NA-1500 dry etching system for 600mm advanced packaging substrates, providing uniform Descum and Ti etching processes.
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ULVAC Launches High-purity Niobium Material for Superconducting Accelerators
Jul 14, 2015 11:00 JST
ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President and CEO: Hisaharu Obinata; hereafter referred to as ULVAC) announces that it has developed niobium material of high purity for superconducting accelerators and will start selling the material in July.
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