1. Home
  2. Press release
Apr 08, 2015 17:30 JST

Source: ULVAC, Inc.

ULVAC and Robert Bosch Sign Basic Agreement for Joint Development of Piezoelectric Device (PZT) for MEMS

Kanagawa, Japan, Apr 08, 2015 - (ACN Newswire) - ULVAC, Inc. (ULVAC) and Robert Bosch GmbH (Bosch) today announced they have signed a basic agreement to jointly develop piezoelectric device (PZT) for MEMS.

Bosch, as a world leading MEMS sensor manufacturer, selected ULVAC's SME-200 sputtering system for the development of upcoming leading edge MEMS. With the growth of MEMS technology, sensors and actuators that use piezoelectric device have been developed and commercialized in recent years. ULVAC believe that MEMS manufacturing technology, such as thin-film deposition and dry etching will be the key factor in producing high quality piezoelectric device in years to come.

Robert Bosch GmbH: www.bosch.com

Contact:
ULVAC, Inc.
Advanced Electronics Equipment Division
Yutaka Nishiyama
TEL: +81-467-89-2139
FAX: +81-467-89-2297
Source: ULVAC, Inc.
Sectors: Electronics

Copyright ©2024 ACN Newswire. All rights reserved. A division of Asia Corporate News Network.

Related Press Release

ULVAC-PHI Launches Sales of Latest XPS System that Dramatically Accelerates Battery Research and Development
July 05 2022 18:00 JST
 
ULVAC Launches the LS High-speed Series of Dry Vacuum Pumps
April 26 2018 09:00 JST
 
ULVAC Launches the Revolutionary Dry Vacuum Pump Accessory ECO-SHOCK ES4A
September 25 2015 15:00 JST
 
ULVAC Launches G-TRAN Series Multi Ionization Gauge ST2
September 25 2015 15:00 JST
 
ULVAC Announces World's First Low Temperature PZT Sputtering Technology
March 24 2015 16:05 JST
 
ULVAC Launches New Addition to the HELIOT 900 Series Leak Detector Family
February 25 2015 10:00 JST
 
ULVAC-RIKO to Sell High Temperature Rapid Thermal Annealing System HT-RTA59HD
November 17 2014 09:15 JST
 
ULVAC to Launch Ceramic Ball Bearing Molecular Pump UTM300B
September 18 2014 08:30 JST
 
ULVAC-RIKO to Sell Thermoelectric Conversion Efficiency Evaluation System for Small Modules Mini-PEM
July 03 2014 10:00 JST
 
ULVAC to Launch New HELIOT 900 Series Leak Detectors
June 26 2014 10:10 JST
 
More Press release >>

Latest Press Release


Four-strong TOYOTA GAZOO Racing squad to push for more Portugal success
May 02, 2024 18:05 JST

Spectacular Spa awaits TOYOTA GAZOO Racing
May 02, 2024 17:46 JST

Q&M Dental Enhances Digital Capabilities by Integrating Align Technology's Newest iTero Lumina(TM) Intraoral Scanner Across Dental Clinics in Singapore
May 02, 2024 11:00 JST

Sumitomo Metal Mining and Mitsubishi Corporation to Participate in Kalgoorlie Nickel Project - Goongarrie Hub
Apr 30, 2024 19:08 JST

New Immuno-Oncology Research Project in Partnership With Merck Starts at the BioMed X Institute in Heidelberg
Apr 30, 2024 18:00 JST

SPARX Group Establishes Space Frontiers Second Fund
Apr 29, 2024 18:49 JST

MHI Establishes Local Subsidiary "Mitsubishi Heavy Industries Vietnam"
Apr 29, 2024 18:00 JST

POSCO Future M and Honda Reach Basic Agreement on Collaboration for Production of Cathode Materials for Automotive Batteries in Canada
Apr 29, 2024 14:25 JST

Honda Plans to Establish Comprehensive Electric Vehicle Value Chain in Ontario, Canada
Apr 29, 2024 14:16 JST

JCB enables JCB Contactless acceptance at Taichung MRT in Taiwan
Apr 26, 2024 10:00 JST

Mazda Production and Sales Results for March 2024 and for April 2023 through March 2024
Apr 25, 2024 18:21 JST

MHI Begins Operation of SOEC Test Module the Next-Generation High-Efficiency Hydrogen Production Technology at Takasago Hydrogen Park
Apr 25, 2024 17:45 JST

GAC Honda to Begin Sales of All-new e:NP2, the Second Model of e:N Series
Apr 25, 2024 16:50 JST

Toyota Exhibiting at Beijing Motor Show 2024
Apr 25, 2024 16:25 JST

Honda Reaches Basic Agreement with Asahi Kasei on Collaboration for Production of Battery Separators for Automotive Batteries in Canada
Apr 25, 2024 11:10 JST

UNIQLO Sponsors KAWS + Warhol Exhibition Tour, Starting in Pittsburgh
Apr 25, 2024 09:00 JST

Mitsubishi Power Begins Commercial Operation of Seventh M701JAC Gas Turbine in Thailand GTCC Project; Achieves 75,000 AOH To-Date
Apr 24, 2024 17:19 JST

MC and Denka Sign J/V Agreement in Fullerene Business
Apr 24, 2024 17:02 JST

Mitsubishi Motors Posts Record Sales in the Philippines in FY2023
Apr 24, 2024 13:56 JST

NEC Develops High-speed Generative AI Large Language Models (LLM) with World-class Performance
Apr 24, 2024 13:25 JST
 More Latest Release >>