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Press Release
ULVAC Continues Participation in "Lab-in-Fab" Project to Advance Piezoelectric MEMS Technology, Now Entering a New Phase
Jun 19, 2025 08:30 JST
ULVAC, Inc. announced that the collaborative development project "Lab-in-Fab," aimed at advancing piezoelectric Micro-Electro-Mechanical Systems (piezoMEMS) *1 technology and in which ULVAC has participated since 2020, is entering a new phase.
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ULVAC Develops Dilution Refrigerator for Quantum Computers
Apr 24, 2025 08:30 JST
ULVAC, Inc. and ULVAC CRYOGENICS INC. have successfully developed a dilution refrigerator*1 designed for quantum computing applications. On April 4, 2025, the unit was installed at a leading quantum research institute*2 in Japan.
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ULVAC Developing Next-Generation Dilution Refrigerator for Quantum Computing by 2026
Mar 21, 2025 09:30 JST
ULVAC, Inc. and ULVAC CRYOGENICS INC. announced that they are developing a next-generation dilution refrigerator for quantum computers with IBM.
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ULVAC Develops Roll-to-Roll Lithium Deposition System, Unveiling at Battery Japan
Feb 13, 2025 07:30 JST
ULVAC, Inc. (HQ: Chigasaki, Kanagawa) is pleased to announce the EWK-030, a state-of-the-art roll-to-roll deposition system designed for lithium coating applications, scheduled for launch in May 2025.
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Breaking Barriers in Data Communication: ULVAC & SAL join forces
Dec 09, 2024 08:00 JST
ULVAC, Inc. (hereinafter referred to as "ULVAC") and Silicon Austria Labs GmbH (hereinafter referred to as "SAL") join forces to collaborate on the development of plasma etching processes for high-volume manufacturing of thin-film lithium niobate (TFLN).
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ULVAC Launches New Deposition System for Semiconductor Applications: Model "ENTRON-EXX"
Dec 02, 2024 08:10 JST
ULVAC, Inc. (HQ: Chigasaki, Kanagawa) has started accepting orders for the ENTRON-EXX, a new multi-chamber deposition system for semiconductor applications. The ENTRON-EXX builds on the proven productivity and flexibility of its predecessor, the ENTRON-EX W300, while offering enhanced data intelligence and expandability.
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ULVAC Launches Oil Rotary Vacuum Pump Gv135
Nov 14, 2024 09:00 JST
ULVAC, Inc. (HQ: Chigasaki, Kanagawa) has announced the Gv135, a new oil rotary vacuum pump optimized for the analytical equipment industry.
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ULVAC Launches Technology Center PYEONGTAEK for Next-Gen Semiconductor Manufacturing Equipment in South Korea
Oct 30, 2024 10:00 JST
ULVAC, Inc., the world's leading comprehensive vacuum manufacturer, has established Technology Center PYEONGTAEK in Pyeongtaek, Gyeonggi-do, South Korea.
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ULVAC-PHI Launches Sales of Latest TOF-SIMS Instrument 'PHI nanoTOF 3+'
Oct 03, 2023 14:40 JST
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ULVAC launches Smartphone-Direct Pirani Gauge "SWU10-U"
Nov 06, 2019 16:00 JST
ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President and CEO: Setsuo Iwashita; hereafter referred to as ULVAC) announces commence sales of Pirani Vacuum Gauge "SWU10-U," which can be connected directly by smartphone with USB cable, on October 31, 2019.
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ULVAC Launches Revolutionary PZT Piezoelectric Thin-film Process Technology and HVM Solution for MEMS Sensors/Actuators
Aug 16, 2019 13:00 JST
ULVAC, Inc. today announced the successful launch of PZT piezoelectric thin-film sputtering technology and a high volume manufacturing (HVM) solution to solve technical issues that have hindered the development of MEMS devices.
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ULVAC Announces the LS High-speed Series of Dry Vacuum Pump
Apr 19, 2018 12:00 JST
ULVAC, Inc., the global leader in vacuum technologies and solutions, has announced the LS series of dry vacuum pumps, with high pumping speed and low power consumption.
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ULVAC Launches Sales of Two Ion Implanters for Power Devices
Jul 06, 2017 17:00 JST
ULVAC, Inc. launches sales of low-acceleration ion implanter, "SOPHI-30" and high-acceleration ion implanter, "SOPHI-400" used for ultrathin wafers processing for power devices.
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ULVAC Launches NA-1500 Dry Etching System for 600mm Advanced Packaging Substrates
Mar 21, 2017 10:00 JST
ULVAC, Inc. is pleased to announce the NA-1500 dry etching system for 600mm advanced packaging substrates, providing uniform Descum and Ti etching processes.
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ULVAC Launches High-purity Niobium Material for Superconducting Accelerators
Jul 14, 2015 11:00 JST
ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President and CEO: Hisaharu Obinata; hereafter referred to as ULVAC) announces that it has developed niobium material of high purity for superconducting accelerators and will start selling the material in July.
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