ULVAC and Robert Bosch Sign Basic Agreement for Joint Development of Piezoelectric Device (PZT) for MEMS

Apr 08, 2015 17:30 JST

Source: ULVAC, Inc.

Kanagawa, Japan, Apr 08, 2015 - (ACN Newswire) - ULVAC, Inc. (ULVAC) and Robert Bosch GmbH (Bosch) today announced they have signed a basic agreement to jointly develop piezoelectric device (PZT) for MEMS.

Bosch, as a world leading MEMS sensor manufacturer, selected ULVAC's SME-200 sputtering system for the development of upcoming leading edge MEMS. With the growth of MEMS technology, sensors and actuators that use piezoelectric device have been developed and commercialized in recent years. ULVAC believe that MEMS manufacturing technology, such as thin-film deposition and dry etching will be the key factor in producing high quality piezoelectric device in years to come.

Robert Bosch GmbH: www.bosch.com

Contact:

ULVAC, Inc.
Advanced Electronics Equipment Division
Yutaka Nishiyama
TEL: +81-467-89-2139
FAX: +81-467-89-2297

Source: ULVAC, Inc.
Sectors: Electronics

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