ULVAC Adds New Products to UNECS Series High Speed Spectroscopic Ellipsometers

Apr 10, 2014 15:45 JST

Source: ULVAC, Inc.

Including a Distinctive Portable Type

Chigasaki, Japan, Apr 10, 2014 - (ACN Newswire) - ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa, Japan; President and CEO: Hisaharu Obinata; hereafter referred to as ULVAC) is pleased to announce that five new products are released in addition to the current product line, which can measure thicknesses and optical coefficients of thin films at a high speed, and started sales on April 10, 2014.

ULVAC Adds New Products to UNECS Series High Speed Spectroscopic Ellipsometers

Background

A spectroscopic ellipsometer is a high-precision and non-contacts measurement instrument that uses changes in the polarization of light to measure the thickness and optical coefficients (refractive index and extinction coefficient) of a transparent or semi-transparent thin film. This instrument is used in many fields, such as the semiconductor and flat panel display industries. Since 2010, ULVAC has offered two UNECS models: the UNECS-2000 high-speed and compact model with an Motorized 200mm stage, and the UNECS-3000A with an auto mapping 300mm stage.

Overview

Five new models have joined the UNECS series:
(1) UNECS-Portable, easy to carry around
(2) UNECS-1500M with a manual 150mm stage
(3) UNECS-1500A with an automatic 150mm stage
(4) UNECS-2000A with an automatic 200mm stage
(5) UNECS-1M, which can be embedded in film deposition equipment

We have also improved some specifications such as an expanded measurement wavelength range (380-760 nm) and an additional small diameter spot (0.3 mm). Customers can select the model that best suits their needs.

Features

The features of the new products are as follows:

(1) UNECS-Portable
The measurement unit weighs only 2.2 kg. It is lightweight, compact and portable. It comes with a simple small stage for measuring small samples. Larger samples can be measured when the stage is detached. A specially designed carry case (optional) is available. This carry case is very useful when using this device to test film thicknesses on-site where the deposition equipment is located.

(2) UNECS-1500M
This product is a basic type equipped with an easy-to-use manual R-theta stage that can hold a 150mm substrate. The UNECS-1500M makes it easy to manually locate measurement points.

(3) UNECS-1500A/2000A
These products are equipped with an auto mapping R-theta stage that can hold a 150mm or 200mm substrate. They can also automatically measure the thickness distribution over a substrate and display the measurements as a color map. The extensive optional functions and accessories include high-precision 2000-pixel mapping, 3D display, and an observation camera.

(4) UNECS-1M/1MV
This product can be integrated into a film deposition system. In addition to an atmospheric type, a vacuum type that can be used in a vacuum is available.

(5) Support for the visible wavelength range
Standard measurement wavelength types (530-750 nm) or visible range types (380-760 nm) are available for all models. Also, you can select a spot diameter from between a standard type (1 mm) and a small diameter type (0.3 mm). (Except for the vacuum built-in type)

Sales plan and prices

Expect to sell 30 units of the UNECS Series High Speed Spectroscopic Ellipsometer per year. The prices of these new models are from: 7,000,000 yen for the portable type; 8,000,000 yen for the manual stage type; 9,500,000 yen for the automatic stage type; and 6,800,000 for the built-in type.

Contact:

ULVAC, Inc.
Components Division
TEL: +81-467-89-2185
http://www.ulvac.co.jp/eng/

Source: ULVAC, Inc.
Sectors: Design Process, Electronics, Engineering, Optoelectronics

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